Hexamethyldisilazane (HMDS)
(21242140 | 999-97-3)

CAS: 999-97-3
Molecular Formula: C6H19NSi2
Molecular Weight: 161.39
Availablility: Inquire for Status
Downloads: Product Specification | Safety Data Sheet [EN]
Hexamethyldisilazane (HMDS) Chemical Structure

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Safety Data Sheet
Certificate of Analysis

Product Detail
Product Code 21242140
Product Name Hexamethyldisilazane (HMDS)
Categories Building Blocks Organics Stains & Indicators
CAS 999-97-3
Molecular Formula C6H19NSi2
Molecular Weight 161.39
Storage Details Ambient
Harmonised Tariff Code 2931900090

Product Specification
Appearance Clear colourless liquid
Assay GC 98% min

Safety Information
Skull and Cross Bones
Signal word danger
Hazard statements
  • EUH029: Contact with water liberates toxic gas

  • H225: Highly flammable liquid and vapour

  • H302: Harmful if swallowed

  • H311: Toxic in contact with skin

  • H314: Causes severe skin burns and eye damage

  • H332: Harmful if inhaled

  • H412: Harmful to aquatic life with long lasting effects
Precautionary statements
  • P210: Keep away from heat/sparks/open flames/hot surfaces. No smoking

  • P260: Do not breathe dust/fume/gas/mist/vapours/spray

  • P264: Wash thoroughly after handling

  • P273: Avoid release to the environment

  • P280: Wear protective gloves/protective clothing/eye protection/face protection

  • P305+351+338: IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses if present and easy to do, continue rinsing