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CAS 6074-84-6 — Tantalum(V) ethoxide

Tantalum(V) ethoxide is a metal alkoxide primarily used as a precursor for the chemical vapor deposition of tantalum oxide thin films in semiconductor manufacturing. This compound is identified by CAS number 6074-84-6 and carries no signal word. Molekula supplies Tantalum(V) ethoxide from research to bulk quantities with full documentation and ISO 9001:2015 traceability.